[S-I-8-3] Formation of β-SiC Nanocrystals by the Relaxation of Si1-yCy Random Alloy Layers

A. R. Powell, F. K. LeGoues, S. S. Iyer (1.IBM Research Division, T.J. Watson Research Center)

https://doi.org/10.7567/SSDM.1993.S-I-8-3