[S-II-14] Characterization of Direct-Contact Via Plug Formed by Use of Selective Al-CVD

N. Takeyasu, Y. Kawano, T. Katagiri, E. Kondoh, H. Yamamoto, T. Ohta (1.LSI Research Center, Kawasaki Steel Co., Ltd.)

https://doi.org/10.7567/SSDM.1993.S-II-14