[S-II-4] Correlation between Chemical Structure and Electrical Properties of NH3-Nitrided N2O Oxides

M. Bhat, G. W. Yoon, A. B. Joshi, J. Kim, J. Ahn, D. L. Kwong, M. Arendt, J. M. White (1.Microelectronics Research Center, Department of Electrical and Computer Engineering The University of Texas, 2.Department of Chemistry The University of Texas)

https://doi.org/10.7567/SSDM.1993.S-II-4