[S-III-1] In-Situ Transmission Electron Microscopy Study of Roughness during Silicon Oxidation and Silicidation

J. M. GIBSON, X. TONG, R. D. TWESTEN, F. M. ROSS (1.University of Illinois, Department of Physics, 2.Lawrence Berkeley Laboratories)

https://doi.org/10.7567/SSDM.1993.S-III-1