[S-III-1] In-Situ Transmission Electron Microscopy Study of Roughness during Silicon Oxidation and Silicidation

J. M. GIBSON、X. TONG、R. D. TWESTEN、F. M. ROSS (1.University of Illinois, Department of Physics、2.Lawrence Berkeley Laboratories)

https://doi.org/10.7567/SSDM.1993.S-III-1