Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)

Masaharu UDAGAWA; Masaaki NIWA; Isao SUMITA

doi:https://doi.org/10.7567/SSDM.1993.S-III-5

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜 1993年9月1日
Makuhari Messe, Chiba, Japan

[S-III-5] Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)

Masaharu UDAGAWA、Masaaki NIWA、Isao SUMITA (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.、2.Matsushita Research Institute Tokyo, Inc.)

https://doi.org/10.7567/SSDM.1993.S-III-5

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