Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)

Masaharu UDAGAWA; Masaaki NIWA; Isao SUMITA

doi:https://doi.org/10.7567/SSDM.1993.S-III-5

[S-III-5] Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)

Masaharu UDAGAWA, Masaaki NIWA, Isao SUMITA (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd., 2.Matsushita Research Institute Tokyo, Inc.)

https://doi.org/10.7567/SSDM.1993.S-III-5

1993 International Conference on Solid State Devices and Materials

[S-III-5] Local Ordering and Layer by Layer Growth of the Initial Thermal Oxide of Si(001)