[S-III-7] Characterization and Control of Native Oxide on Silicon

Mizuho MORITA, Tadahiro OHMI (1.Department of Information Science, Graduate School of Information Sciences, Tohoku University, 2.Department of Electronic Engineering, Faculty of Engineering, Tohoku University, 3.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1993.S-III-7