[S-IV-12] The Disk Shape Stacked Capacitor Cell for 256Mb DRAM

T. Morihara、Y. Ohno、T. Katayama、T. Eimori、S. Satoh、H. Miyoshi (1.ULSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1993.S-IV-12