[S-IV-12] The Disk Shape Stacked Capacitor Cell for 256Mb DRAM

T. Morihara, Y. Ohno, T. Katayama, T. Eimori, S. Satoh, H. Miyoshi (1.ULSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1993.S-IV-12