[S-IV-15] Bird's-Beak-Controlled Poly Buffered Locos Isolation (BPBL) Technology for 256Mb DRAM

W. S. Yang, M. U. Hwang, W. S. Paik, W. S. Lee, C. S. Choi, C. G. Hwang (1.Advanced Technology Development Center, Memory Division, Semiconductor Business, SAMSUNG Electronics Co. Ltd)

https://doi.org/10.7567/SSDM.1993.S-IV-15