A New Insight into Atomic Scale Morphology of H-Terminated Si(100) Surfaces Studied by FT-IR-ATR and Scanning Probe Microscopies

C. H. Bjorkman; M. Fukuda; T. Yamazaki; S. Miyazaki; M. Hirose

doi:https://doi.org/10.7567/SSDM.1994.A-1-2

[A-1-2] A New Insight into Atomic Scale Morphology of H-Terminated Si(100) Surfaces Studied by FT-IR-ATR and Scanning Probe Microscopies

C. H. Bjorkman, M. Fukuda, T. Yamazaki, S. Miyazaki, M. Hirose (1.Research Center for Integrated Systems, Dept. of Electical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1994.A-1-2

1994 International Conference on Solid State Devices and Materials

[A-1-2] A New Insight into Atomic Scale Morphology of H-Terminated Si(100) Surfaces Studied by FT-IR-ATR and Scanning Probe Microscopies