The Japan Society of Applied Physics

[A-1-3] Effects of H-Termination of Si(100) Surfaces on Electrical Characteristics of Metal/Silicon Interfaces

S. Zaima、J. Kojima、M. Hayashi、H. Ikeda、H. Iwano、Y. Yasuda (1.Department of Crystalline Materials Science, School of Engineering, Nagoya University)

https://doi.org/10.7567/SSDM.1994.A-1-3