[A-4-4] Fabrication of Superconducting NbN Gate MOSFET for Hybrid Circuit Applications

N. Suzuki、K. Yamamoto、S. Matsumoto、I. Kurosawa、M. Aoyagi、S. Takada (1.Faculty of Science and Technology, Keio University、2.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1994.A-4-4