[A-4-4] Fabrication of Superconducting NbN Gate MOSFET for Hybrid Circuit Applications

N. Suzuki, K. Yamamoto, S. Matsumoto, I. Kurosawa, M. Aoyagi, S. Takada (1.Faculty of Science and Technology, Keio University, 2.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1994.A-4-4