The Japan Society of Applied Physics

[A-5-1] Local Dielectric Breakdown of Thin Silicon Oxide by Dense Contact Electrification

Yoshinobu FUKANO、Takayuki UCHIHASHI、Takahiro OKUSAKO、Yasuhiro SUGAWARA、Yoshiki YAMANISHI、Takahiko OASA、Seizo MORITA (1.Department of Physics, Faculty of Science, Hiroshima University、2.Advanced Technology Research Labs., Sumitomo Metal Industries, Ltd.)

https://doi.org/10.7567/SSDM.1994.A-5-1