The Japan Society of Applied Physics

[A-6-1] Micromachined Silicon-Based Analytical Microinstruments for Space Science and Planetary Exploration

F. J. Grunthaner, R. E. Salder, S. Boumsellek, T. R. VanZandt, T. W. Kenny, M. H. Hecht, A. Ksendzov, M. L. Homer, R. W. Terhune, A. L. Lane, M. A. Butler, A. J. Ricco (1.Center for Space Microelectronics, Jet Propulsion Laboratory, California Institute of Technology, 2.Sandia National Laboratories)