[A-6-1] Micromachined Silicon-Based Analytical Microinstruments for Space Science and Planetary Exploration

F. J. Grunthaner、R. E. Salder、S. Boumsellek、T. R. VanZandt、T. W. Kenny、M. H. Hecht、A. Ksendzov、M. L. Homer、R. W. Terhune、A. L. Lane、M. A. Butler、A. J. Ricco (1.Center for Space Microelectronics, Jet Propulsion Laboratory, California Institute of Technology、2.Sandia National Laboratories)

https://doi.org/10.7567/SSDM.1994.A-6-1