[A-7-4] Stability and Mobility of Surface Precursors for Reaction Gases in W-CVD

Ryotaro IRIE、Nobuyoshi KOBAYASHI、Jiro USHIO、Yoshiaki TAKEMURA、Takuya MARUIZUMI (1.Hitachi, Ltd. Central Research Laboratory)

https://doi.org/10.7567/SSDM.1994.A-7-4