[A-8-4] Direct Observation of Vacancy Supersaturation in Retarded Diffusion of Boron in Silicon Probed by Monoenergetic Positron Beam

K. Osada, Y. Zaitsu, S. Matsumoto, S. Tanigawa, A. Uedono, M. Yoshida, E. Arai, T. Abe (1.Faculty of Science and Technology, Keio University, 2.Institute of Materials Science, University of Tsukuba, 3.Kyusyu Insti. of De., 4.NTT LSI Labs., 5.SEH R&D Center Shin-Etsu Handotai Co., Ltd.)

https://doi.org/10.7567/SSDM.1994.A-8-4