The Japan Society of Applied Physics

[C-10-3] Studies of Corrosive Outgasses from Via Holes Using Thermal Desorption Spectroscopy

S. Tokitoh、H. Uchida、H. Uchida、Y. Okuno、K. Fushimi、G. Liu、Y. Sakaya、N. Hirashita (1.VLSI Research and Development Center, Process Technology Center OKI Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1994.C-10-3