[C-11-1] Ion-Assisted Low-Temperature Surface Reflow of BPSG for Highly-Reliable Contact Metallization

O. Tatsumi, K. Ino, N. Konishi, Y. Kawai, T. Ohmi (1.Department of Electronic Engineering, Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1994.C-11-1