[C-11-1] Ion-Assisted Low-Temperature Surface Reflow of BPSG for Highly-Reliable Contact Metallization

O. Tatsumi、K. Ino、N. Konishi、Y. Kawai、T. Ohmi (1.Department of Electronic Engineering, Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1994.C-11-1