[C-11-4] Characteristics of the Oxidation Barrier Layers for Copper Metallization

K.-I. Lee, K.-I. Min, S.-K. Joo, K.-G. Rha, W.-S. Kim (1.GoldStar Electron Semi. Lab, 2.Dep. Met'l Eng. Seoul Nat'l Univ)

https://doi.org/10.7567/SSDM.1994.C-11-4