[C-11-4] Characteristics of the Oxidation Barrier Layers for Copper Metallization

K.-I. Lee、K.-I. Min、S.-K. Joo、K.-G. Rha、W.-S. Kim (1.GoldStar Electron Semi. Lab、2.Dep. Met'l Eng. Seoul Nat'l Univ)

https://doi.org/10.7567/SSDM.1994.C-11-4