[C-12-1] Selective CVD-Al Contact Plug on Rapid Thermal Processed TiSi2 in NH3 for High Speed CMOS Using Salicide Process

Hiroshi Shinriki, Takayuki Komiya, Nobuyuki Takeyasu, Tomohiro Ohta (1.LSI Research Laboratory, Kawasaki Steel Corp.)

https://doi.org/10.7567/SSDM.1994.C-12-1