[C-12-1] Selective CVD-Al Contact Plug on Rapid Thermal Processed TiSi2 in NH3 for High Speed CMOS Using Salicide Process

Hiroshi Shinriki、Takayuki Komiya、Nobuyuki Takeyasu、Tomohiro Ohta (1.LSI Research Laboratory, Kawasaki Steel Corp.)

https://doi.org/10.7567/SSDM.1994.C-12-1