[C-12-4] Solid-Phase Reactions in Al Alloy/TiN/Ti/Si Systems Observed by In-Situ Cross-Sectional TEM

S. Sobue、S. Mukainakano、Y. Ueno、T. Hattori (1.Research Laboratories, Nippondenso Co. Ltd.)

https://doi.org/10.7567/SSDM.1994.C-12-4