[C-6-3] Highly Reproducible Fabrication Process for Passivated AlGaAs/GaAs HBT's with Pt/Ti/Pt/Au Base Electrodes
Sadato Hongo、Tohru Sugiyama、Yasuhiko Kuriyama、Norio Iizuka、Masao Obara
(1.Toshiba Research and Development Center)
https://doi.org/10.7567/SSDM.1994.C-6-3
