[C-6-3] Highly Reproducible Fabrication Process for Passivated AlGaAs/GaAs HBT's with Pt/Ti/Pt/Au Base Electrodes

Sadato Hongo, Tohru Sugiyama, Yasuhiko Kuriyama, Norio Iizuka, Masao Obara (1.Toshiba Research and Development Center)

https://doi.org/10.7567/SSDM.1994.C-6-3