[C-6-5] Effects of Sulfide Passivation on the Performance of GaAs MISFETs with Photo-CVD Grown P3N5 Gate Insulators

Yoon-Ha Jeong、Ki-Hawn Choi、Seong-Kue Jo、Bongkoo Kang (1.Department of Electronic and Electrical Engineering Pohang University of Science and Technology)

https://doi.org/10.7567/SSDM.1994.C-6-5