[C-6-5] Effects of Sulfide Passivation on the Performance of GaAs MISFETs with Photo-CVD Grown P3N5 Gate Insulators

Yoon-Ha Jeong, Ki-Hawn Choi, Seong-Kue Jo, Bongkoo Kang (1.Department of Electronic and Electrical Engineering Pohang University of Science and Technology)

https://doi.org/10.7567/SSDM.1994.C-6-5