Relationship between Water Diffusivity of Dielectric Films and Accelerated Hot Carrier Degradation Caused by Water

Kenji Fukuda; Tadashi Nakano; Masaaki Fujishima; Naomi Mura Kyoji Tokunaga; Akihiko Tuzumitani Shuji Ichinose

doi:https://doi.org/10.7567/SSDM.1994.C-8-3

[C-8-3] Relationship between Water Diffusivity of Dielectric Films and Accelerated Hot Carrier Degradation Caused by Water

Kenji Fukuda、Tadashi Nakano、Masaaki Fujishima、Naomi Mura Kyoji Tokunaga、Akihiko Tuzumitani Shuji Ichinose (1.LSI Research Center, Kawasaki Steel Corporation、2.Technology Development Center, Kawasaki Steel Corporation)

https://doi.org/10.7567/SSDM.1994.C-8-3

1994 International Conference on Solid State Devices and Materials

[C-8-3] Relationship between Water Diffusivity of Dielectric Films and Accelerated Hot Carrier Degradation Caused by Water