[C-9-2] Highly Reliable Silicon Nitride Films Made by Jet Vapor Deposition

X. W. Wang, T-p. Ma, G. J. Cui, T. Tamagawa, J. W. Golz, S. Karecki, B. L. Halpern, J. J. Schmitt (1.Yale University and Jet Process Corporation)

https://doi.org/10.7567/SSDM.1994.C-9-2