[C-9-2] Highly Reliable Silicon Nitride Films Made by Jet Vapor Deposition

X. W. Wang、T-p. Ma、G. J. Cui、T. Tamagawa、J. W. Golz、S. Karecki、B. L. Halpern、J. J. Schmitt (1.Yale University and Jet Process Corporation)

https://doi.org/10.7567/SSDM.1994.C-9-2