[LD-5] MOVPE Growth of Beryllium Doped Inp Using Bismethylcyclopentadienyl-Beryllium

T. Kimura、T. Ishida、T. Sonoda、S. Takamiya、S. Mitsui (1.Optoelectronic & Microwave Devices Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1994.LD-5