[PA-4-6] Mobility Improvement by Counter Doping and Its Reverse Short Channel Effect Associated Channel-Length-Dependent Degradation

E. P. Ver Ploeg、H. Noda、K. Umeda、R. Nagai、S. Kimura (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1994.PA-4-6