[PB-1-10] Fabrication of GaAs/AlGaAs Quantum Dots by Metal-Organic Vapor Phase Epitaxy on Patterned GaAs Substrates

J. Motohisa, K. Kumakura, M. Kishida, T. Yamazaki, T. Fukui, H. Hasegawa, K. Wada (1.Research Center for Interface Quantum Electronics and Faculty of Engineering, Hokkaido University, 2.NTT LSI Laboratories)

https://doi.org/10.7567/SSDM.1994.PB-1-10