[PB-1-11] Misorientation Effects on Al Composition in AlxGa1-xAs/GaAs Determined by High-Resolution XRD

Jong-Hyeob Baek、Meeyoung Yoon、Bun Lee、El-Hang Lee (1.Electronics and Telecommunications Research Institute, Research Department)

https://doi.org/10.7567/SSDM.1994.PB-1-11