[PB-1-4] Generation of the Surface Cross-Hatch Pattern in InxGa1-xAs/GaAs Epitaxial Layers Grown by MOCVD

Meeyoung Yoon, Jong-Hyeob Baek, Bun Lee, Hyo-Hoon Park, El-Hang Lee (1.Electronics and Telecommunications Research Institute, Research Department)

https://doi.org/10.7567/SSDM.1994.PB-1-4