In Situ Analysis of Two-Dimensional Distribution of Stresses in Growing Films

S. Tamulevicius; M. Andrulevicius; A. Matiukas; L. Pranevicius

doi:https://doi.org/10.7567/SSDM.1994.PB-1-5

1994 International Conference on Solid State Devices and Materials

Aug 23, 1994 - Aug 26, 1994
Pacifico Yokohama, Yokohama, Japan

[PB-1-5] In Situ Analysis of Two-Dimensional Distribution of Stresses in Growing Films

S. Tamulevicius, M. Andrulevicius, A. Matiukas, L. Pranevicius (1.Kaunas University of Technology, Department of Physics, 2.Vytatutas Magnus University, Department of Physics)

https://doi.org/10.7567/SSDM.1994.PB-1-5

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