[PB-2-7] Investigation of Surface Damage in GaInAs/GaInAsP/InP Wire Structures by Low-Energy-Reactive-Ion Assisted Radical Etching

Munehisa TAMURA, Yasuaki NAGASHIMA, Koji KUDO, Ki-Chul SHIN Shigeo TAMURA, Akinori UBUKATA, Shigehisa ARAI (1.Department of Physical Electronics, Tokyo Institute of Technology, 2.Technology Devision, Tsukuba Laboratory, Nippon Sanso Co.)

https://doi.org/10.7567/SSDM.1994.PB-2-7