[PD-1-1] Selective Aluminum Chemical Vapor Deposition Using DMEAA

S. C. Sun, M. H. Tsai, H. T. Chiu, S. Y. Yang (1.Department of Electronics Engineering & Institute of Electronics, National Nano Device Laboratory, Institute of Applied Chemistry Chiao Tung University)

https://doi.org/10.7567/SSDM.1994.PD-1-1