[PD-1-1] Selective Aluminum Chemical Vapor Deposition Using DMEAA
S. C. Sun, M. H. Tsai, H. T. Chiu, S. Y. Yang
(1.Department of Electronics Engineering & Institute of Electronics, National Nano Device Laboratory, Institute of Applied Chemistry Chiao Tung University)
https://doi.org/10.7567/SSDM.1994.PD-1-1
