[PD-1-2] Resistance Anomaly of Al/CVD-W Interconnects in Deep Sub-Micron Width

Mitsuru Sekiguchi, Toyokazu Fujii, Michinari Yamanaka, Masanori Fukumoto (1.Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1994.PD-1-2