[PD-3-1] Initial Stage of Oxidation of Hydrogen-Terminated Si(100)-2×1 Surface

T. Aiba、K. Yamauchi、Y. Shimizu、N. Tate、M. Katayama、T. Hattori (1.Musashi Institute of Technology、2.Shin-Etsu Handotai Co. Ltd.)

https://doi.org/10.7567/SSDM.1994.PD-3-1