[PD-3-1] Initial Stage of Oxidation of Hydrogen-Terminated Si(100)-2×1 Surface

T. Aiba, K. Yamauchi, Y. Shimizu, N. Tate, M. Katayama, T. Hattori (1.Musashi Institute of Technology, 2.Shin-Etsu Handotai Co. Ltd.)

https://doi.org/10.7567/SSDM.1994.PD-3-1