[PD-3-5] Novel Dry Cleaning Using AHF-Alcohol with the New "Hot"Cluster Tool

F. Mieno、K. Suzuki、A. Shimizu、A. Tsukune、S. Sugawa、S. Kudoh、M. Nagase、M. Kawano (1.Mass Production Div., Iwate Plant, FUJITSU limited、2.Process Development Div., Mie Plant, FUJITSU limited)

https://doi.org/10.7567/SSDM.1994.PD-3-5