[PD-3-5] Novel Dry Cleaning Using AHF-Alcohol with the New "Hot"Cluster Tool

F. Mieno, K. Suzuki, A. Shimizu, A. Tsukune, S. Sugawa, S. Kudoh, M. Nagase, M. Kawano (1.Mass Production Div., Iwate Plant, FUJITSU limited, 2.Process Development Div., Mie Plant, FUJITSU limited)

https://doi.org/10.7567/SSDM.1994.PD-3-5