[PD-3-6] Different Hydrogen Passivation Effects on Low-Temperature and High-Temperature Processed Poly-Si TFT's

Y. S. Kim, K. Y. Choi, S. K. Lee, Y. H. Kim, M. K. Han (1.Dep't. of Electrical Eng., Seoul Nat'l Univ., 2.Dep't of Electronic Materials Eng., The Univ. of Suwon)

https://doi.org/10.7567/SSDM.1994.PD-3-6