[PD-3-6] Different Hydrogen Passivation Effects on Low-Temperature and High-Temperature Processed Poly-Si TFT's

Y. S. Kim、K. Y. Choi、S. K. Lee、Y. H. Kim、M. K. Han (1.Dep't. of Electrical Eng., Seoul Nat'l Univ.、2.Dep't of Electronic Materials Eng., The Univ. of Suwon)

https://doi.org/10.7567/SSDM.1994.PD-3-6